In-Line Processing

In microelectronics manufacturing, advanced in-line processing plasma systems are essential for enhancing throughput and efficiency. These systems are designed for high-volume processing, capable of handling hundreds of substrates or carriers per hour. They feature small chamber volumes for short cycle times and are highly configurable to suit various manufacturing needs. With a focus on uniform treatment and process consistency, these systems ensure repeatable results across all product positions. Key features include unique productivity optimizations and multiple in-line modules, ideal for processes like pre-Flip-Chip Underfill, and are equipped with dual-lane handling to further increase throughput.

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