Plasma treatment for in-line processes
FlexTRAK
Product Description
The FlexTRAK™ is the latest addition to the March TRAK series, and is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space requirements.
Key Features
- High-throughput capability of up to 480 substrates or process carriers per hour.
- Three-axis symmetrical chamber ensures all positions of the product are treated uniformly.
- Easily Integrates with a variety of process equipment, Including wire bond, die attach, dispense, mold and marking equipment.
- Ultimate application flexibility for direct, downstream and Ion-free (patent-pending) plasma.
- Which allows treatment without exposure to the direct plasma glow discharge.
- Compact, three-axis symmetrical chamber and proprietary process control for unmatched process uniformity.
- Industry-leading throughput capacity with short cycle times.
Technical Specification
- Dimensions (W X D X H): 382 x 1210 x 1595 mm
- FlexTRACK Weight: 430 kg (948 lbs)
- FlexTRACK-S Weight: 315 kg (1213 lbs)
- Software Control: PLC Control with Windows Based Touch screen interface
- Maximum Volume: 5.5 Liters – FlexTRACK-S: 9.6 Liters
- FlexTRACK-CD Working Area: 305 x 305 mm
- FlexTRACK-CDS Working Area: 305 x 560 mm
- Standard Wattage: 600 W
- Maximum Number of MFCs: 3
- Frequency: 13.56 MHz
- Standard Wet Pump: 19.5 cfm with Oxygen Oil Mist Eliminator
- Optional Purged Dry Pump: 16 cfm
- N2 Purged Pump Flow: 2 slm
- Power Requirements: 220 VAC, 15A, 50/60 Hz, 1-Phase, 12 AWG, 3-Wire
- Process Gas Fitting Size & Type: 6.35 mm OD Swagelok Tube
- Process Gas Purity: Lab or Electronic Grade
- Process Gas Pressure: 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max., regulated