Plasma Treatment for Batch Manufacturing


Product Description

The AP-600 plasma system from March Plasma is designed to deliver exceptionally uniform plasma cleaning and treatment with unmatched ease of operation, reliability and low cost. The plasma system is completely self-contained, requiring minimal bench space. Suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices. The AP-600 plasma system can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases.

Key Features

  • Three electronic mass flow controllers as standard (Max 4)
  • 13.56 MHz RF Generator with Automatic Matching Network Delivers Excellent Process Repeatability.
  • Completely self-contained, requiring minimal bench space.
  • Multiple (up to 7) removable and adjustable powered or grounded shelves can be accommodated.
  • Touch Screen Control and Graphical User Interface Give Real-Time Process Information.
  • Convenient Facility Hook-Ups for Periodic Calibration Requirements Used in Validation Processes.
  • Can accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.

Technical Specification

  • Dimensions (W x D x H): 569 x 869 x 704 mm
  • Weight: 221 kg (487 lbs)
  • Software Control: PLC Control with Windows Based Touch screen interface
  • Maximum Volume: 50.4 Liters
  • Powered Working Area: 330 x 330 mm
  • Ground Working Area: 368 x 330 mm
  • Standard Wattage: 600 W
  • Frequency: 13.56 MHz
  • Standard Wet Pump: 19.5 cfm with Oxygen Oil Mist Eliminator
  • Optional Purged Dry Pump: 22 cfm
  • N2 Purged Pump Flow: 2 slm
  • Power Requirements: 220 VAC, 10A, 50/60 Hz, Single Phase, 12 AWG, 3-Wire
  • Process Gas Fitting Size & Type: 6.35 mm OD Swagelok Tube
  • Process Gas Purity: Lab or Electronic Grade
  • Process Gas Pressure: 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max., regulated

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