Non-Contact Profilometer For Large Areas

CT 300

Product Description

The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system.

It can handle up 12″ wafers or other large substrates and parts. Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measuring wafer thickness.

Key Features

  • 315 mm travel in x- and y-direction, lateral resolution 0.05 microns, optional motorized z-axis
  • Large scanning areas, up to the maximum travel of 315 mm with maximum x-, y-, z-resolution
  • Chromatic white light sensors
  • 3D white light interferometer
  • Confocal microscope
  • High-speed confocal line sensor
  • Interferometer for thickness measurement
  • Measurement speed 2kHz / 4kHz / 20 kHz
  • Fast and accurate magnetic linear motors
  • High resolution off-axis camera
  • 2D profiles and 3D topographical maps (topography measurement)

Technical Specification

  • Dimensions: (L X W X H) 900 x 1040 x 1600 mm Standing Workstation
  • Weight: 400 kg (880 lbs)
  • System Controller: Includes Motion Control, Sensor Controller (2 kHz), Power Supplies, USB Interface to Workstation
  • Power Requirements: 100-240 V AC, 50-60 Hz, 2 amps (240 V), 5 amps (100 V)
  • Measurement Surface Size: 400 x 400 mm
  • Linear Encoder Resolution: 0.05 µm
  • Minium Lateral Resolution: 1 micron
  • Travel Limits in X and Y (Motorized): 315 x 315 mm
  • Travel Limit in Z (Manual): 50 mm
  • Maximum Load on Platform: 10 Kg
  • Available Sensors: Confocal White Light Sensors, Confocal Laser Sensors, Laser Triangulations Sensors, Interferometers (white light and Infrared)

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