Non-Contact Profilometer For Large Areas
CT 300
Product Description
The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system.
It can handle up 12″ wafers or other large substrates and parts. Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measuring wafer thickness.
Key Features
- 315 mm travel in x- and y-direction, lateral resolution 0.05 microns, optional motorized z-axis
- Large scanning areas, up to the maximum travel of 315 mm with maximum x-, y-, z-resolution
- Chromatic white light sensors
- 3D white light interferometer
- Confocal microscope
- High-speed confocal line sensor
- Interferometer for thickness measurement
- Measurement speed 2kHz / 4kHz / 20 kHz
- Fast and accurate magnetic linear motors
- High resolution off-axis camera
- 2D profiles and 3D topographical maps (topography measurement)
Technical Specification
- Dimensions: (L X W X H) 900 x 1040 x 1600 mm Standing Workstation
- Weight: 400 kg (880 lbs)
- System Controller: Includes Motion Control, Sensor Controller (2 kHz), Power Supplies, USB Interface to Workstation
- Power Requirements: 100-240 V AC, 50-60 Hz, 2 amps (240 V), 5 amps (100 V)
- Measurement Surface Size: 400 x 400 mm
- Linear Encoder Resolution: 0.05 µm
- Minium Lateral Resolution: 1 micron
- Travel Limits in X and Y (Motorized): 315 x 315 mm
- Travel Limit in Z (Manual): 50 mm
- Maximum Load on Platform: 10 Kg
- Available Sensors: Confocal White Light Sensors, Confocal Laser Sensors, Laser Triangulations Sensors, Interferometers (white light and Infrared)