High-Performance Plasma Treatment for Batch Manufacturing

AP-1000

Product Description

Nordson MARCH’s AP-1000 is designed to meet the rigorous demands of 24-hour operation in high-performance manufacturing environments. The system delivers quality plasma treatment along with unmatched reliability, safety and ease of operation and maintenance. All the components of the system, including the plasma process chamber, the control electronics, the 13.56 MHz power supply with automatic impedance matching network, and the pumping system are housed within an enclosure constructed of rugged powder coated aluminium. The system delivers quality plasma treatment along with unmatched reliability, safety and ease of operation and maintenance. PLC controller with touch screen interface provides industrial reliability and ease of use. The complete system enclosure minimizes footprint.

Key Features

  • Four electronic mass flow controllers as standard.
  • 13.56 MHz RF Generator with Automatic Matching Network Delivers Excellent Process Repeatability.
  • Completely self-contained, requiring minimal space.
  • Multiple (up to 14) removable and adjustable powered or grounded shelves can be accommodated.
  • Touch Screen Control and Graphical User Interface Give Real-Time Process Information.
  • Convenient Facility Hook-Ups for Periodic Calibration Requirements Used in Validation Processes.
  • Can accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.

Technical Specification

  • Dimensions (W X D X H): 680 x 1127 x 1890 mm
  • Weight: 485 kg (1069 lbs)
  • Software Control: PLC Control with Windows Based Touch screen interface
  • Maximum Volume: 127 Liters
  • Powered Working Area: 349 x 425 mm
  • Ground Working Area: 384 x 425 mm
  • Standard Wattage: 600 W
  • Optional Wattage: 1000 W
  • Frequency: 13.56 MHz
  • Standard Wet Pump: 53 cfm with Oxygen Oil Mist Eliminator
  • Optional Purged Dry Pump: 63 cfm
  • N2 Purged Pump Flow: 14 slm
  • Power Requirements: 220 V, 25A, 50/60 Hz, 3-phase, 8 AWG, 4-Wire
  • Process Gas Fitting Size & Type: 6.35 mm OD Swagelok Tube
  • Process Gas Purity: Lab or Electronic Grade
  • Process Gas Pressure: 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max., regulated

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