Flexible Non-Contact Profilometer

CT 100

Product Description

The CT 100 is a compact, high resolution non-contact profilometer.

The main components of the system are a white light sensor and an x-, y-motion system on a granite platform. The chromatic white light sensors combine high accuracy and high measurement speed. The sensors are available with a resolution down to 3 nm and measurement range up to 12 mm. The system can scan a maximum area of 150 mm x 150 mm. The unique cyberTECHNOLOGIES Software offers sophisticated surface metrology analysis and automated measurement routines.

Key Features

  • Large scanning areas, up to the maximum travel of 150 mm with maximum x-, y-, z-resolution
  • 150 mm travel in x- and y-direction, lateral resolution 0.05 microns
  • Chromatic white light sensors
  • 3D white light interferometer
  • Interferometer for thickness measurement
  • Measurement speed: 2 kHz / 4 kHz / 20 kHz
  • High resolution camera
  • Fast and accurate magnetic linear motors
  • 2D profiles and 3D topographical maps (topography measurement)

Technical Specification

  • Dimensions: (L X W X H) 450 x 350 x 450 mm
  • Weight: 44 kg (97 lbs)
  • System Controller: Includes Motion Control, Sensor Controller (2 kHz), Power Supplies, USB Interface to Workstation
  • Power Requirements: 100-240 V AC, 50-60 Hz, 2 amps (240 V), 5 amps (100 V)
  • Measurement Surface Size: 230 x 230 mm
  • Linear Encoder Resolution: 0.05 µm
  • Minium Lateral Resolution: 1 micron
  • Travel Limits in X and Y (Motorized): 150 x 150 mm
  • Travel Limit in Z (Manual): 40 mm
  • Maximum Load on Platform: 10 Kg
  • Available Sensors: Confocal White Light Sensors, Confocal Laser Sensors

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