Cyberscan 3D Profilometer
CT 150
Product Description
The CYBERSCAN CT 150 is a compact, high resolution, non-contact 3D profilometer.
The main components of the system are a confocal white light line sensor and a precise x/y motion system build on a stable granite platform. The high-speed line sensor is available with a resolution down to 20 nm and a measurement range up to 3,9 mm and can aquire up to 1.15 million datapoints per second. With the X/Y-stage samples up to 150 x 150 mm can be scanned which makes the system the perfect entry into the world of high-end metrology.
Key Features
- High-Resolution 3D metrology system
- Compact design and high-speed sensor
- 150 X 150 mm scanning area
- Automated z-axis with autofocus function
- User friendly concept
- Sophisticated analysis and automation software
- Measurement range up to 3,9 mm
- Resolution down to 20 nm
- Integrated camera with LED illumination for easy navigation on sample and fiducial correction
Technical Specification
- Dimensions: (L X W X H) 701 x 491 x 875 mm
- Weight: 85 kg (187 lbs)
- System Controller: Includes Motion and Sensor Controller with USB Interface to Workstation
- Power Requirements: 100-240 V AC, 50-60 Hz, 2 amps (240 V), 5 amps (100 V)
- Travel Limits in X and Y: 150 mm
- Minimum Stepsize: 1 µm
- Travel Limit in Z (Manual): 100 mm
- Available Sensors: Confocal White Light Line Sensor (L-CHR) with exchangeable sensor head.
- Available Sensor Heads: (more sensor heads available)
- L-CHR-200 (range: 200 μm / resolution: 20 nm / NA: 90° +/-44°)
- L-CHR-500 (range: 500 μm / resolution: 50 nm / NA: 90° +/-38°)
- L-CHR-950 (range: 950 μm / resolution: 80 nm / NA: 90° +/-33°)
- L-CHR-3900 (range: 3,9 mm / resolution: 320nm / NA: 90° +/-20°)