cyberTECHNOLOGIES Interferometer for thickness measurement
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On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.
  • High accurate thickness measurements
  • White light and infrared sensors available
  • Special models for thin wafers, rough wafers and doped wafers
  • Integrated Green & Keevers dispersion table
  • White light interferometer with standard PCHR sensor requires one controller
  • High speed‑ 4 kHz
  • Multi sensor mounts



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