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cyberTECHNOLOGIES 3D white light interferometer
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diagram
Scan 400x300
Sensor
The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z‑direction an image is taken at each position. All images are compiled to obtain the 3D topography.
  • Z-resolution down to 0.1 nm
  • X/Y-resolution as small as 0.23 µm
  • High numeric aperture objectives
  • Measurement range: 100 µm, 250 µm or 400 µm
  • Ideal for roughness measurements on super smooth surfaces
  • Fixed mag or automatic turret
  • Multi-Sensor mount
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For further information please visit www.cybertechnologies.com