cyberTECHNOLOGIES CT 300 Non-Contact Profilometer For Large Areas

The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12" wafers or other large substrates and parts.

Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measuring wafer thickness.

Features

315 mm travel in x- and y-direction, lateral resolution 0.05 microns, optional motorized z-axis
Large scanning areas, up to the maximum travel of 315 mm with maximum x-, y-, z-resolution
Chromatic white light sensors
3D white light interferometer
Confocal microscope
High-speed confocal line sensor
Interferometer for thickness measurement
Measurement speed 2kHz / 4kHz / 20 kHz
Fast and accurate magnetic linear motors
High resolution off-axis camera
2D profiles and 3D topographical maps (topography measurement)

Quick Enquiry Form

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For further information please visit www.cybertechnologies.com

Accelonix Limited
Unit 2, McClintock Building
Granta Park
Great Abington
Cambridge
CB21 6GP
Tel: +44(0)1223 659965

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