Model 1500 Wafer Aligner is used for precise alignment of wafers up to 200 mm in diameter.

Model 1500 Wafer Aligner
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Model 1500
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Model 1500 Wafer Aligner is used for precise alignment of wafers up to 200 mm in diameter. It is a manually operated wafer aligner capable of wafer sizes to 8-inch (200 mm) diameter. This clean-room compatible aligner includes two CCD cameras mounted on microscope zoom lenses and connected to a split-screen 17-inch LCD monitor. Fibre optic light rings and illuminators are provided for wafer fiducial illumination. The camera lenses are mounted on fully adjustable (X-Y-Z) stages for positioning over the wafer fiducials. One wafer is clamped via a vacuum chuck to the fixed lower stage. Wafer stage co-planarity adjustment is provided and the lower chuck may be adjusted in the vertical (Z) axis as desired for wafer separation and contact. The second wafer is vacuum clamped to an upper stage which may be adjusted in three axes (X-Y-theta) to bring both wafers into alignment within 5 micron accuracy. The wafer pair may then be clamped for transfer to a bonding system. The aligner is designed to be placed on a customer-provided table. A small shelf rack is included to hold camera power supplies, illuminators and related equipment.
  • Accelerometers
  • Flip Chips
  • MEMS Devices
  • Night Vision IR Sensors
  • Miniature Crystals
  • Many more …
  • Wafer Size Range: 100 mm to 200 mm
  • Minimum Fiducial Spacing: 50 mm
  • Alignment Accuracy: 5um
  • Overall Size (W x D x H): 66 cm x 46 cm x 56 cm
  • Weight: 90 Kg
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