Nordson MARCH is the global leader in plasma cleaning and treatment equipment, and plasma applications technology.

March RIE-1701 Plasma System
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March RIE-1701 Plasma System
Norsdon March Logo
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The RIE-1701 anisotropic reactive ion etch (RIE) plasma system from Nordson MARCH is self-contained, and requires minimal bench space. The chassis, which also serves as an integrated safety enclosure, houses the plasma chamber, control electronics, 13.56 MHz RF generator, and automatic matching network.
The plasma chamber is constructed of high-quality anodized aluminium with ceramic fixturing for superior durability. The plasma chamber can be configured with a 6” or 8” powered electrode to accommodate a wide range of wafer sizes, piece parts, IC packages and other components. The RIE-1701 plasma system is designed for advanced etching applications such as removal of interlayer films for failure analysis; de-encapsulation and dielectric material removal; etching of oxides, nitrides, polyimides, silicon, metal, III-V and II-VI materials for MEMS, LED, or IC device manufacturing; epoxy removal; photoresist stripping and descum. The system can accommodate a wide range of process gases, including: Ar, O2, H2/forming gas, He, CF4, SF6, Cl2, and BCl3. Standard are 2 electronic mass flow controllers for optimal gas control, with 2 more available as an option (4 total).
  • Touch Screen Control and Graphical User Interface Provides Real-Time Process Data and Feedbackv
  • 13.56 MHz RF Generator with Automatic Matching Network Delivers Excellent Process Repeatability
  • Temperature Control Loop Integrated into Plasma Chamber Enables Precise Control Run-to-Run
  • Turbomolecular Pump Package and Butterfly Valve Pressure Control Options Available
  • Enclosure is Aluminium Framed with Thermoplastic Panels
  • 600 W, Solid State 13.56 MHz RF Generator
  • Automatic Tuning Network
  • 2x Integrated Mass Flow Controllers
  • PLC Touch Screen with Interface
  • 19.5 CFM (@60 Hz) Wet Pump with Oil Mist Eliminator
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For further information please visit http://www.nordson.com/en/divisions/march