March FlexTRAK Plasma System
The FlexTRAK™ is the latest addition to the March TRAK series, and is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space requirements.
- Easily Integrates with a Variety of Process Equipment, Including Wire Bond, Die Attach, Dispense, Mold and Marking Equipment
- Ultimate Application Flexibility for Direct, Downstream and Ion-free (Patent-Pending) Plasma,
- which Allows Treatment without Exposure to the Direct Plasma Glow Discharge
- Compact, Three-Axis Symmetrical Chamber and Proprietary Process Control for Unmatched Process Uniformity
- Industry-Leading Throughput Capacity with Short Cycle Times
- A Unique, Slim Structure that Requires Minimal Floor Space
- Powder-Coated Aluminium Chamber
- In-Line Automatic, Manual and Pass-Through
- Controlled Vacuum Exhaust
- Flexible Inlet Gas Flow Geometries
- Two Mass Flow Controllers
- Hydrogen Ready
- Touch-Screen PC with Intuitive Graphical User Interface
- Unlimited Alphaneumeric Recipe Storage
- 16 CFM Dry Pump
- Variable Frequency Drive for Process Consistency
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For further information please visit http://www.nordson.com/en/divisions/march