March FlexTRAK Plasma System

The FlexTRAK™ is the latest addition to the March TRAK series, and is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space requirements.

• Easily Integrates with a Variety of Process Equipment, Including Wire Bond, Die Attach, Dispense, Mold and Marking Equipment
• Ultimate Application Flexibility for Direct, Downstream and Ion-free (Patent-Pending) Plasma,
• which Allows Treatment without Exposure to the Direct Plasma Glow Discharge
• Compact, Three-Axis Symmetrical Chamber and Proprietary Process Control for Unmatched Process Uniformity
• Industry-Leading Throughput Capacity with Short Cycle Times
• A Unique, Slim Structure that Requires Minimal Floor Space

• Powder-Coated Aluminium Chamber
• In-Line Automatic, Manual and Pass-Through
• Controlled Vacuum Exhaust
• Flexible Inlet Gas Flow Geometries
• Two Mass Flow Controllers
• Hydrogen Ready
• Touch-Screen PC with Intuitive Graphical User Interface
• Unlimited Alphaneumeric Recipe Storage
• 16 CFM Dry Pump
• Variable Frequency Drive for Process Consistency