Nordson MARCH is the global leader in plasma cleaning and treatment equipment, and plasma applications technology.

March FlexTRAK-2MB Plasma System
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March FlexTRAK-2MB Plasma System
Norsdon March Logo
Designed for high-throughput, inline processing of microelectronic devices held in boats, trays or other carriers; ideal for pre-Flip-Chip Underfill (FCUF) processes. Unique boat bypass feature optimizes productivity, multiple inline plasma modules and production-ready dual-lane boat handling increase throughput.

The patented plasma module provides exceptional uniformity and run-to-run process repeatability. Its advanced three axis symmetrical plasma chamber ensures control over all process parameters and highly repeatable results. The system seamlessly integrates into a production line, while accommodating a wide range of boat sizes, yielding unmatched production flexibility. Its compact plasma chamber and proprietary process control system minimize cycle time. The integrated boat handler of the FlexTRAK-2MB system provides rapid material transfer, up to 2 boats per plasma cycle. Combined with the compact design and short plasma cycle, the system maximizes through-put and minimizes cost of ownership.

  • Plasma processes for pre-flip chip underfill, pre-die attach, pre-wire bond and pre-mold steps
  • Plasma Contamination Removal & Cleaning
  • Roughen surfaces to improve adhesion and reduced delamination
  • Modify surfaces to increase bond strength and surface tension properties
  • Improve flip chip underfill performance by minimizing voids, enhancing adhesion, increasing wicking speed and maximizing fillet height uniformity
  • PLC Control with PC-Based Touch Screen Interface
  • 600W RF Power
  • Variable Electrode Configurations: Power-Ground, Ground-Power; Power-Power
  • Unique boat bypass feature optimizes productivity
  • Multiple inline plasma modules increase throughput
  • High uniform plasma treatment
  • Production ready dual lane boat handling
  • Ideal for pre-Flip-Chip Underfill (FCUF) processes



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