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Optical Sensor Options For Non‑Contact Surface Measurement

cyberTECHNOLOGIES optical profilometers interact with a broad range of materials and topographies due to the various sensors available. With options of Confocal White light in point, line and microscope form,  laser in several configurations, interferometry and microscope options, the systems are able to provide data from diverse materials.

Applications with solid, powder, paste or liquid materials can be assessed with resolutions from 3 nm upwards, measurement range to 25 mm, and working heights to 80 mm can be accommodated within the range. A key feature is that highly reflective surfaces, glass, and even black surfaces can be measured.

Confocal white light Sensor
Confocal sensor

Light consisting of different wavelengths is projected on different height levels. The spectrometer analyzes intensity vs. wavelength. A height reading is generated when the intensity of a certain wavelength reaches a maximum in the spectrometer.

Interferometer for thickness measurement

On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.

3D White Light Interferometer

The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z‑direction an image is taken at each position. All images are compiled to obtain the 3D topography.

3D Confocal Microscope
Confocal Microscope

Light is focused through a spinning disk and the objective lens on the surface of the measurement. The holes on the disk serve as detecting pinholes to remove out‑of‑focus light. Only the surface pixel which are in focus are captured by the CCD camera. The objective lens is moved in z by a piezo drive. Each confocal image is a slice through the topography of the sample.